Design and control of a rotary dual-stage actuator positioning system

被引：36

作者：

Zheng, Jinchuan ^{[1
]}

Salton, Aurelio ^{[1
]}

Fu, Minyue ^{[1
,2
]}

机构：

[1] Univ Newcastle, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia

[2] Zhejiang Univ, Sch Control Sci & Engn, Hangzhou 310003, Zhejiang, Peoples R China

来源：

MECHATRONICS | 2011年 / 21卷 / 06期

基金：

澳大利亚研究理事会;

关键词：

Composite nonlinear control; Dual-stage actuator; Finite element method; Motion control; SERVO;

D O I：

10.1016/j.mechatronics.2011.03.011

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the design and control of a rotary dual-stage actuator (DSA) positioning system, which has a flexure-based beam driven by a voice coil motor (VCM) and a piezoelectric (PZT) actuator simultaneously. The design goal is to enable the two actuators complementary to each other for the combined ability of high positioning accuracy and a large tangential displacement range. To achieve a high tracking speed, the flexure beam is designed via finite element method (FEM) analysis to have sufficiently high open-loop bandwidth. System identification and measurements on the DSA prototype are also presented to verify the FEM analysis. Finally, the composite nonlinear control (CNC) method is applied to the DSA system. Experimental results demonstrate that the DSA servo system significantly outperforms the single-stage servo system in both step tracking and disturbance rejection. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：1003 / 1012

页数：10

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