Influence of modulating ratio on friction and wear Behavior of TiN/Ti multilayer coatings

被引：7

作者：

Gong Hai-Fei ^{[1
]}

Shao Tian-Min ^{[1
]}

Zhang Chen-Hui ^{[1
]}

Xu Jun ^{[1
]}

机构：

[1] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China

来源：

JOURNAL OF INORGANIC MATERIALS | 2008年 / 23卷 / 04期

关键词：

TiN and Ti; multilayer coating; layer structure; friction and wear;

D O I：

10.3724/SP.J.1077.2008.00758

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Influence of modulating ratio on friction and wear behavior of TiN/Ti multilayer coatings was studied. Filtered cathode vacuum arc(FCVA) deposition method was applied in preparation of TiN/Ti multilayer coatings with different modulating ratios. Scanning electron microscope (SEM) and transmission electron microscope (TEM) were used in the film structure observation and individual layer analysis. Furthermore, nanohardness and elastic module were tested by nano-indenter and the friction and wear experiment was carried out on SRV tester. The experimental results show clear laminate structures in TiN/Ti multilayer coatings and good bonding between film and substrate. Nanohardness and the wear behavior are influenced remarkably by modulating ratio. Influence of modulating ratio on friction of multilayer coatings is relatively weak. Finally, the relationship between the ratio of hardness and elastic module (HIE) and the wear behavior of TiN/Ti multilayer coatings is discussed.

引用

页码：758 / 762

页数：5

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