High-power operations of single-mode surface grating long oxide aperture VCSELs

被引:13
作者
Hassan, Ahmed M. A. [1 ,2 ]
Gu, Xiaodong [1 ,3 ]
Nakahama, Masanori [1 ,3 ]
Shinada, Satoshi [4 ]
Ahmed, Moustafa [5 ]
Koyama, Fumio [1 ]
机构
[1] Tokyo Inst Technol, Inst Innovat Res, Midori Ku, 4259-R2-22 Nagatsuta Cho, Yokohama, Kanagawa 2268503, Japan
[2] Al Azhar Univ, Fac Sci, Dept Phys, Assiut, Egypt
[3] Ambit Photon Inc, Tokyo Tech Yokohama Venture Plaza E208, Yokohama, Kanagawa 2268510, Japan
[4] Natl Inst Informat & Commun Technol, 4-2-1 Nukui Kitamachi, Koganei, Tokyo 1848795, Japan
[5] Minia Univ, Fac Sci, Dept Phys, Al Minya 61519, Egypt
关键词
HIGH-BEAM-QUALITY; WAVE-GUIDE; EMITTING LASERS; HIGH-BRIGHTNESS; OUTPUT; ARRAY; FIELD;
D O I
10.1063/5.0066590
中图分类号
O59 [应用物理学];
学科分类号
摘要
A high-power single-mode vertical cavity surface emitting laser (VCSEL) based on a slow light mode (SLM) concept is demonstrated. Shallow surface gratings were implemented to select a single slow light mode in mm long oxide aperture VCSELs. The vertical structure and well-established fabrication processes are unchanged from those of conventional 850 nm VCSELs. An electron-beam lithography is used to form a 1st-order shallow grating on the surface. Thanks to the low effective index and the intensity penetration of the SLM to the surface, the grating fabrication process is much easier than conventional guided mode distributed feedback lasers. A stable single mode with a high side suppression ration of more than 30 dB is obtained for the entire current range under CW operations. A narrow divergence of 0.038 & DEG; in far field patterns is achieved for a 6 mm long device. A record single-mode power of more than 5 W is realized before saturation under 50 ns pulse operations. Unlike long cavity in-plane edge emitting lasers, a SLM-based VCSEL can provide higher output powers without limitation of catastrophic optical mirror damage. The high power, superior mode stability, and good beam quality of our unique design paves a way for VCSELs to be used for wide ranges of high-power applications.
引用
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页数:8
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