Application of carbonaceous material for fabrication of nano-wires with a scanning electron microscopy

Electron-beam-induced deposition (EBID) was studied for the fabrication of nanometer scale wire features (nano-wires). Residual hydrocarbon molecules in a scanning electron microscope chamber was used as a precursor and the writing conditions of carbonaceous wires was extensively investigated. A high acceleration voltage and high magnificaiton led to narrower growth of a carbon wire and a wire width of 30 nm was obtained under optimized conditions. For fabrication of conducting nano-wires, the carbon wire and a spin-coated SiO2 were employed as a dry etching mask and a nano-wire of heavily phosphorous-doped Si with a 60 nm width was successfully fabricated. by this novel technique.