Synthesis and Characterization of Copper Doped Zinc Oxide Thin Films for CO Gas Sensing

被引：6

作者：

Bharadwaj, Sachin S. ^{[1
]}

Shivaraj, B. W. ^{[1
]}

Murthy, H. N. Narasimha ^{[1
]}

Krishna, M. ^{[1
]}

Ganiger, Manjush ^{[1
]}

Idris, Mohd ^{[1
]}

Anawal, Pundaleek ^{[1
]}

Angadi, Vitthal Sangappa ^{[1
]}

机构：

[1] RV Coll Engn, Dept Mech Engn, Bangalore 560059, Karnataka, India

来源：

MATERIALS TODAY-PROCEEDINGS | 2018年 / 5卷 / 10期

关键词：

CZO; gas sensor; CO; sensitivity; ANOVA; OPTICAL-PROPERTIES; ZNO; TEMPERATURE; SENSOR;

D O I：

10.1016/j.matpr.2018.06.478

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Objective of this work was to synthesize Copper doped Zinc Oxide (CZO) films and optimization of process parameters by varying molarity of zinc acetate dehydrate from 0.5 M to 1.0 M, concentration of copper acetate monohydrate from 1% to 5 % and annealing temperature from 200 degrees C to 300 degrees C to measure the sensitivity of CZO films for CO (Carbon Monoxide) gas. The concentration of CO gas was maintained at 5 ppm and operating temperature of 250 degrees C was used for sensing. Analysis for sensitivity showed highest grading for parametric combination of 0.75 molarity, 3% copper concentration and 300 degrees C annealing temperature with surface roughness of 3.90 nm and grain size of 256 nm. TEM image revealed the crystalline grain size was 5 nm. ANOVA showed that annealing temperature influenced the sensitivity by 69.06 %. (C) 2018 Elsevier Ltd. All rights reserved.

引用

页码：20904 / 20911

页数：8

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