Research of optical and structural properties in Cu/Ti multilayer films

The Cu/Ti multilayer (ML) films were deposited on Si(100) and Si(111) substrate with a series of pair layers with Vanguard sputtering system. The influences of periodic number and substrate structure on UV-reflectivity of Cu/Ti superlattice films were investigated carefully. The result shows that the Cu/Ti ML films have clear layer-structure. The ML films deposited on Si(100) and Si(111) have UV-reflectivity of about 90% and 67% at 200nm, respectively, but they have lower soft X-ray reflectivity of about 1.9% at 13.04 nm in terms of wavelength, with near normal incidence of 5 degrees. The transmission microscope image indicates that the fabricated Cu/Ti ML films have superlattice structure. (c) 2005 Elsevier Ltd. All rights reserved.