The method of determination of external magnetic field influence on electron beam and electrical circuits in Scanning Electron Microscope

被引：0
|
作者：
Pluska, Mariusz [1 ,2 ]
Oskwarek, Lukasz [1 ]
机构：
[1] Warsaw Univ Sci & Technol, Inst Elektrotech Teoretycznej & Syst Informacyjno, PL-00661 Warsaw, Poland
[2] Warsaw Univ Sci & Technol, Inst Technol Elekt, PL-00661 Warsaw, Poland
来源：
PRZEGLAD ELEKTROTECHNICZNY | 2008年 / 84卷 / 05期
关键词：
Scanning Electron Microscopy; electron-microscope image distortions; electromagnetic interference;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The electron-microscope image distortion caused by external fields (noises) interaction is one of the most frequent undesirable effects in practical Scanning Electron Microscope (SEM). In the paper some tasks deal with influences of electromagnetic interference (EMI) on the imaging results are presented. The method allowed for determination of the distortions impact on several components of SEM system sources is reviewed in more detail.
引用
收藏
页码：345 / 348
页数：4
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