Monte-Carlo simulation of low-voltage scanning electron microscopy - LVSEM

被引：0

作者：

Kuhr, JC ^{[1
]}

Fitting, HJ ^{[1
]}

机构：

[1] Univ Rostock, Dept Phys, D-18051 Rostock, Germany

来源：

ELECTRON MICROSCOPY 1998, VOL 1: GENERAL INTEREST AND INSTRUMENTATION | 1998年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：451 / 452

页数：2

共 50 条

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