Preparation of heteroepitaxial Pb(Mg1/3Nb2/3)O3 (PMN) thin film by pulsed laser deposition on Si(001) substrate using La0.5Sr0.5CoO3 (LSCO)/CeO2/YSZ triple buffer

被引:21
作者
Wakiya, N [1 ]
Shinozaki, K [1 ]
Mizutani, N [1 ]
机构
[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Met & Ceram Sci, Meguro Ku, Tokyo 1528552, Japan
关键词
PLD; epitaxial; PMN; LSCO; CeO2; YSZ and dielectric property;
D O I
10.1016/S0040-6090(00)01862-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Preparation of heteroepitaxial Pb(Mg1/3Nb2/3)O-3 (PMN) thin films by pulsed laser deposition (PLD) was successful on Si(001) substrate using La0.5Sr0.5CoO3 (LSCO)/CeO2/YSZ triple buffer structure for the first time. Using this triple buffer, the formation of pyrochlore type compounds was completely suppressed. The heteroepitaxial growth of PMN, LSCO, CeO2 and YSZ on Si(001) substrate was confirmed by both X-ray pole figure measurement and RHEED observation. In this work, the thickness dependency of both crystal structure and electrical properties of PMN thin film was examined as a function of the thickness of PMN between 1.6 and 130 Mm. The lattice parameter and FWHM (omega scan) of PMN thin films increased with the decrease of the thickness of PMN. The current density of PMN thin film was low irrespective of the thickness of PMN (9.2 x 10(-7) and 2.9 x 10(-6) A/cm(2) for 130- and 6.3-nm-thick, respectively Dielectric constant of heteroepitaxial PMN thin film was decreased with the thickness, which was attributed to the depletion width. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:189 / 194
页数:6
相关论文
共 22 条
[1]   FERROELECTRIC PROPERTIES IN EPITAXIALLY GROWN BAXSR1-XTIO3 THIN-FILMS [J].
ABE, K ;
KOMATSU, S .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (12) :6461-6465
[2]   X-RAY AND NEUTRON-DIFFRACTION STUDIES OF THE DIFFUSE PHASE-TRANSITION IN PBMG1/3NB2/3O3 CERAMICS [J].
BONNEAU, P ;
GARNIER, P ;
CALVARIN, G ;
HUSSON, E ;
GAVARRI, JR ;
HEWAT, AW ;
MORELL, A .
JOURNAL OF SOLID STATE CHEMISTRY, 1991, 91 (02) :350-361
[3]  
CROSS LE, 1987, FERROELECTRICS, V76, P241, DOI 10.2109/jcersj.99.829
[4]  
Ebihara K., 2000, Oyo Buturi, V69, P310
[5]   Crystal structure and dielectric property of epitaxially grown (Ba, Sr)TiO3 thin film prepared by molecular chemical vapor deposition [J].
Funakubo, H ;
Takeshima, Y ;
Nagano, D ;
Shinozaki, K ;
Mizutani, N .
JOURNAL OF MATERIALS RESEARCH, 1998, 13 (12) :3512-3518
[6]  
GOO E, 1986, J AM CERAM SOC, V69, pC188, DOI 10.1111/j.1151-2916.1986.tb04835.x
[7]   Crystal and electrical characterizations of oriented yttria-stabilized zirconia buffer layer for the metal/ferroelectric/insulator/semiconductor field-effect transistor [J].
Hirai, T ;
Teramoto, K ;
Nagashima, K ;
Koike, H ;
Matsuno, S ;
Tanimoto, S ;
Tarui, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (07) :4016-4020
[8]   Interface control of Pb(ZrxTi1-x)O-3 thin film on silicon substrate with heteroepitaxial YSZ buffer layer [J].
Horita, S ;
Naruse, T ;
Watanabe, M ;
Masuda, A ;
Kawada, T ;
Abe, Y .
APPLIED SURFACE SCIENCE, 1997, 117 :429-433
[9]   Ferroelectric properties of SrRuO3/(Ba,Sr)TiO3/SrRuO3 epitaxial capacitor [J].
Kawakubo, T ;
Komatsu, S ;
Abe, K ;
Sano, K ;
Yanase, N ;
Fukushima, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (9B) :5108-5111
[10]   PULSED-LASER DEPOSITION OF BATIO3 THIN-FILMS AND THEIR OPTICAL-PROPERTIES [J].
KIM, DH ;
KWOK, HS .
APPLIED PHYSICS LETTERS, 1995, 67 (13) :1803-1805