Micromachining for rf communications

被引：5

作者：

Young, DJ ^{[1
]}

机构：

[1] Case Western Reserve Univ, Dept EECS, Cleveland, OH 44106 USA

来源：

MRS BULLETIN | 2001年 / 26卷 / 04期

关键词：

D O I：

10.1557/mrs2001.74

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：331 / 332

页数：2

共 9 条

[1] High-Q VHF micromechanical contour-mode disk resonators [J].

Clark, JR ;

Hsu, WT ;

Nguyen, CTC .

INTERNATIONAL ELECTRON DEVICES MEETING 2000, TECHNICAL DIGEST, 2000, :493-496

[2] Performance of low-loss RF MEMS capacitive switches [J].

Goldsmith, CL ;

Yao, ZM ;

Eshelman, S ;

Denniston, D .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (08) :269-271

[3]

Hyman D, 1999, INT J RF MICROW C E, V9, P348, DOI 10.1002/(SICI)1099-047X(199907)9:4<348::AID-MMCE6>3.0.CO

[4]

2-K

[5]

MCGRUER NE, 1998, SOL STAT SENS ACT WO, P132

[6] VHF free-free beam high-Q micromechanical resonators [J].

Wang, K ;

Yu, YL ;

Wong, AC ;

Nguyen, CTC .

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :453-458

[7]

YAO JJ, 1995, 8 INT C SOL STAT SEN, V2, P384

[8]

YOUNG DJ, 1998, SOL STAT SENS ACT WO, P128

[9]

YOUNG DJ, 1996, SOL STAT SENS ACT WO, P86

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