InGaN quantum nanodisks in nanopillars fabricated by dry etching of InGaN/GaN MQWs

While quantum heterostructures are typically achieved via growth, here in this paper we would like to demonstrate InGaN quantum nanodisks in nanopillars fabricated by dry etching of InGaN/GaN MQWs. The fabricated quantum nanodisks of sub-30 nm dimension are investigated using micro-photoluminescence measurements and time-resolved photoluminescence studies. Changes in quantum confinement have been successfully demonstrated by micro-photoluminescence studies with a reduction of the PL bandwidth of over 54% after fabrication of the quantum nanodisks. The quantum confinement effect of the nanodisk is further verified using TRPL measurement, which demonstrated a reduction of over 80% of TRPL lifetime. The reduction in lifetime implies an increase in radiative recombination rate and thus better quantum efficiencies.