Evaluation of the small particle adhesion force on low temperature surface in high vacuum using atomic force microscopy
被引:0
作者:
Miwa, Takafumi
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机构:
Tokyo Inst Technol, Dept Phys, Meguro Ku, Tokyo 1528551, Japan
Hitachi Ltd, Res & Dev Grp, Kokubunji, Tokyo 1858601, JapanTokyo Inst Technol, Dept Phys, Meguro Ku, Tokyo 1528551, Japan
Miwa, Takafumi
[1
,2
]
Hashizume, Tomihiro
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机构:
Tokyo Inst Technol, Dept Phys, Meguro Ku, Tokyo 1528551, Japan
Hitachi Ltd, Res & Dev Grp, Kokubunji, Tokyo 1858601, JapanTokyo Inst Technol, Dept Phys, Meguro Ku, Tokyo 1528551, Japan
Hashizume, Tomihiro
[1
,2
]
机构:
[1] Tokyo Inst Technol, Dept Phys, Meguro Ku, Tokyo 1528551, Japan
[2] Hitachi Ltd, Res & Dev Grp, Kokubunji, Tokyo 1858601, Japan
atomic force microscopy;
adhesion force;
capillary force;
particle;
SPRING CONSTANT;
CONTAMINATION;
CANTILEVERS;
MECHANISM;
D O I:
10.35848/1347-4065/ac7d82
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
The adhesion force of small particles on a substrate surface depends on various parameters, including the surface roughness, temperature, and surrounding environment. In this study, atomic force microscopy was used to investigate the surface temperature dependence of the adhesion force of small silica particles on relatively smooth and rough Al substrates at temperatures below room temperature in high vacuum. The adhesion force did not depend on the temperature of the rough substrate. On the smooth substrate with a temperature decrease from 298 K, the adhesion force increased and was the largest at 273 K. Moreover, the adhesion force decreased from 273 to 213 K and remained almost constant below 213 K. The change in adhesion force was explained in terms of the surface diffusion of water molecules that formed capillaries. Its activation barrier was deduced to be 96 meV in the range of 273-213 K.
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Antoun, G.
;
Dussart, R.
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Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Dussart, R.
;
Tillocher, T.
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h-index: 0
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Tillocher, T.
;
Lefaucheux, P.
论文数: 0引用数: 0
h-index: 0
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Lefaucheux, P.
;
Cardinaud, C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Nantes, CNRS, Inst Mat Jean Rouxel, IMN, BP32229, F-44322 Nantes 3, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Cardinaud, C.
;
Girard, A.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Nantes, CNRS, Inst Mat Jean Rouxel, IMN, BP32229, F-44322 Nantes 3, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Girard, A.
;
Tahara, S.
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h-index: 0
机构:
Tokyo Electron Miyagi Ltd, 1 Techno Hills, Taiwa, Miyagi, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Tahara, S.
;
Yamazaki, K.
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Electron Ltd, Minato Ku, Akasaka Biz Tower,3-1 Akasaka 5 Chome, Tokyo, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Yamazaki, K.
;
Yatsuda, K.
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h-index: 0
机构:
Tokyo Electron Ltd, Minato Ku, Akasaka Biz Tower,3-1 Akasaka 5 Chome, Tokyo, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Yatsuda, K.
;
Faguet, J.
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h-index: 0
机构:
TEL Technol Ctr Amer LLC, NanoFab 300 South 255 Fuller Rd,Suite 214, Albany, NY USAOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Faguet, J.
;
Maekawa, K.
论文数: 0引用数: 0
h-index: 0
机构:
TEL Technol Ctr Amer LLC, NanoFab 300 South 255 Fuller Rd,Suite 214, Albany, NY USAOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Antoun, G.
;
Dussart, R.
论文数: 0引用数: 0
h-index: 0
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Dussart, R.
;
Tillocher, T.
论文数: 0引用数: 0
h-index: 0
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Tillocher, T.
;
Lefaucheux, P.
论文数: 0引用数: 0
h-index: 0
机构:
Orleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Lefaucheux, P.
;
Cardinaud, C.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Nantes, CNRS, Inst Mat Jean Rouxel, IMN, BP32229, F-44322 Nantes 3, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Cardinaud, C.
;
Girard, A.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Nantes, CNRS, Inst Mat Jean Rouxel, IMN, BP32229, F-44322 Nantes 3, FranceOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Girard, A.
;
Tahara, S.
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Electron Miyagi Ltd, 1 Techno Hills, Taiwa, Miyagi, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Tahara, S.
;
Yamazaki, K.
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Electron Ltd, Minato Ku, Akasaka Biz Tower,3-1 Akasaka 5 Chome, Tokyo, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Yamazaki, K.
;
Yatsuda, K.
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Electron Ltd, Minato Ku, Akasaka Biz Tower,3-1 Akasaka 5 Chome, Tokyo, JapanOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Yatsuda, K.
;
Faguet, J.
论文数: 0引用数: 0
h-index: 0
机构:
TEL Technol Ctr Amer LLC, NanoFab 300 South 255 Fuller Rd,Suite 214, Albany, NY USAOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France
Faguet, J.
;
Maekawa, K.
论文数: 0引用数: 0
h-index: 0
机构:
TEL Technol Ctr Amer LLC, NanoFab 300 South 255 Fuller Rd,Suite 214, Albany, NY USAOrleans Univ, CNRS, GREMI, 14 Rue Issoudun BP 6744, F-45067 Orleans, France