Investigation of inhomogeneity of BaTiO3 thin films using transmittance spectra measurements

被引：10
作者：
Nenkov, M
Pencheva, T
机构：
[1] Department of Physics, Russe University, 8 Studentska St.
来源：
THIN SOLID FILMS | 1998年 / 324卷 / 1-2期
关键词：
refractive index; films; inhomogeneity;
D O I：
10.1016/S0040-6090(98)00373-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The investigation deals with determination of thin film refractive index depth profile (inhomogeneity) using the film interference transmittance spectrum only. Barium titanate films deposited at different conditions are studied and a new approach for investigation of the film inhomogeneity is proposed. It is based on transmittance spectra fitting using numerical optimisation methods. Two models for the refractive index variations in the film (linear and non-linear) together with a homogeneous layer model are used to describe the films. The best fit between measurements and calculations is found for the model using quadratic variations of the refractive index in the film. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：305 / 310
页数：6
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