SmartBit™:: Bitmap to defect correlation software for yield improvement

被引：10

作者：

Merino, MA ^{[1
]}

Cruceta, S ^{[1
]}

机构：

[1] Lucent Technol, Madrid, Spain

来源：

2000 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP | 2000年

关键词：

yield; yield improvement; bitmap; correlation; defect;

D O I：

10.1109/ASMC.2000.902586

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The need of higher yields on the wafer-manufacturing environment is pushing the yield analysts to develop new techniques and tools for yield improvement. With this scope, we present SmartBit(TM), a software tool that provides detailed information about yield limiters by correlating bitmap to in-line defect data in an automatic made, expediting the yield learning task. Based on the spatial correlation of bitmap data and the information of defects coming from the inline inspections, SmartBit(TM) provides a pareto where yield loss sources are separated and weighted by impact. SmartBit(TM) also offers detailed information about the killer defects (defect class, origin, size, kill ratio and more) into a set of reports specially designed to obtain an overall view about the main problems affecting the fab yield. This is the key to fast and efficient yield learning. These reports are generated automatically using data from the full production of memory-products enhancing the reliability and completeness of the analysis.

引用

页码：194 / 198

页数：5