Cryogenic target for low debris soft x-ray generation

被引:1
作者
Lin, JQ [1 ]
Chen, B [1 ]
Cao, JL [1 ]
机构
[1] Chinese Acad Sci, Changchun Inst Opt & Fine Mech, State Key Lab Appl Opt, Changchun, Peoples R China
来源
X-RAY AND ULTRAVIOLET SPECTROSCOPY AND POLARIMETRY II | 1998年 / 3443卷
关键词
low-debris; cryogenic CO2 target; laser plasma; soft x-ray source;
D O I
10.1117/12.333611
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Low-debris laser-produced plasma is a much better soft x-ray source than conventional metal target laser plasma in many applications. We present a cryogenic target low-debris laser plasma source and give its experimental results in this paper.
引用
收藏
页码:154 / 157
页数:4
相关论文
共 5 条
[1]   VELOCITY CHARACTERIZATION OF PARTICULATE DEBRIS FROM LASER-PRODUCED PLASMAS USED FOR EXTREME-ULTRAVIOLET LITHOGRAPHY [J].
BENDER, HA ;
OCONNELL, D ;
SILFVAST, WT .
APPLIED OPTICS, 1995, 34 (28) :6513-6521
[2]  
HAWRYLUK AM, 1993, APPL OPTICS, V32, P1669
[3]  
LIN JQ, 1998, SPIE BEIJING
[4]   SCANNING-X-RAY MICROSCOPY USING A LASER-PLASMA SOURCE [J].
MICHETTE, AG ;
TURCU, ICE ;
SCHULZ, MS ;
BROWNE, MT ;
MORRISON, GR ;
FLUCK, P ;
BUCKLEY, CJ ;
FOSTER, GF .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (06) :1478-1482
[5]  
TURCU ICE, 1992, XRAY MICROSCOPY, V3, P54