Dependence of functional properties on processing in sol-gel (Pb, La)TiO3 thin films

被引:0
作者
Algueró, M [1 ]
Kholkin, A
Calzada, ML
Pardo, L
机构
[1] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
[2] Univ Aveiro, Dept Eng Ceram & Vidro, P-3810193 Aveiro, Portugal
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2000年 / 71卷 / 02期
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pb0.88La0.08TiO3 films were processed on Si-based substrates by a diol-based sol-gel route from solutions with variable content of PbO excess. Crystallisation was performed at heating rates of 10 degreesC min(-1) and higher than 500 degreesC min(-1) (rapid heating). The pyroelectric coefficient was measured after poling the samples by two methods: applying a sinusoidal wave and applying a train of square pulses, with the latter showing a higher poling efficiency. The piezoelectric d(33) coefficient was determined by double-beam interferometry. Strain vs. field measurements provided evidence of 90 degrees domain orientation in these films. Those crystallised at 10 degreesC min(-1) showed the highest functional properties (gamma = 1.7 x 10(-2) muC cm(-2) K-1 and d(33) = 57 pm V-1). This is a consequence of the higher stability of the 90 degrees domains oriented during poling, caused by the lower tensile stress al-ising during preparation. The voltage responsivity of these films also benefited from the lower permittivity arising from their. higher porosity. These films are good candidates for applications in infrared detectors and microelectromechanical devices.
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页码:195 / 202
页数:8
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