In situ growth of ZnO nanorods array film on the surface of ITO for low temperature detection of NOx gas

被引：7
作者：
Jin, Xiaojuan [1 ]
Yan, Yilin [1 ]
Tian, Lecheng [1 ]
Zhang, Jiaqi [2 ]
机构：
[1] Changchun Univ Sci & Technol, Jilin Prov Sci & Technol Innovat Ctr Opt Mat & Ch, Sch Chem & Environm Engn, Changchun 130022, Peoples R China
[2] Jilin Univ, Coll Mat Sci & Engn, Minist Educ, Key Lab Automobile Mat, Changchun 130012, Peoples R China
来源：
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2022年 / 142卷
关键词：
ZnO; Nanorods; Hydrophobic; Gas sensor; Thin film; METAL-OXIDE NANOSTRUCTURES; SENSING PROPERTIES; THIN-FILMS; NANOWIRES; SENSORS; SENSITIVITY; SUBSTRATE; ELECTRODE; DEFECTS; AU;
D O I：
10.1016/j.mssp.2022.106522
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Nitrogen oxides are one of the most harmful gases and highly toxic to human health if inhaled at moderate atmospheric concentrations or above (10-20 mmHg). Sensing NOx is one of the most challenging tasks at low temperature levels and room temperature. The ZnO nanostructures were successfully synthesized by hydro thermal method. The wettability and gas sensitivity of the ZnO nanorods array film were studied. The results show that the ZnO nanorods array film is hydrophobic by adding KCl. In addition, the ZnO nanorods array film shows a positive response to NOx. The gas sensing performance shows that the sensor response based on ZnO nanorods array film has a linear relationship with the concentration of NOx in the range of 0.1-3 ppm. It has good reproducibility and selectivity. The maximum sensitivity to NOx was obtained at an operating temperature of 120 C. The response of the sensor is 25 when the concentration of NOx is 3 ppm.
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页数：16
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