Influence of the Electron Beam and the Choice of Heating Membrane on the Evolution of Si Nanowires' Morphology in In Situ TEM

被引：3

作者：

Shen, Ya ^{[1
]}

Zhao, Xuechun ^{[1
]}

Gong, Ruiling ^{[1
]}

Ngo, Eric ^{[2
]}

Maurice, Jean-Luc ^{[2
]}

Cabarrocas, Pere Roca, I ^{[2
]}

Chen, Wanghua ^{[1
]}

机构：

[1] Ningbo Univ, Sch Phys Sci & Technol, Ningbo 315211, Peoples R China

[2] Inst Polytech Paris, Ecole Polytech, CNRS, Lab Phys Interfaces & Couches Minces LPICM, F-91128 Palaiseau, France

来源：

MATERIALS | 2022年 / 15卷 / 15期

关键词：

electron beam irradiation; silicon nanowire; growth; TEM; GROWTH; MANIPULATION; IRRADIATION; MICROSCOPY;

D O I：

10.3390/ma15155244

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We used in situ transmission electron microscopy (TEM) to observe the dynamic changes of Si nanowires under electron beam irradiation. We found evidence of structural evolutions under TEM observation due to a combination of electron beam and thermal effects. Two types of heating holders were used: a carbon membrane, and a silicon nitride membrane. Different evolution of Si nanowires on these membranes was observed. Regarding the heating of Si nanowires on a C membrane at 800 degrees C and above, a serious degradation dependent on the diameter of the Si nanowire was observed under the electron beam, with the formation of Si carbide. When the membrane was changed to Si nitride, a reversible sectioning and welding of the Si nanowire was observed.

引用

页数：10

共 46 条

[1] In situTEM modification of individual silicon nanowires and their charge transport mechanisms [J].

Alam, Sardar B. ;

Andersen, Christopher R. ;

Panciera, Federico ;

Nilausen, Aage A. S. ;

Hansen, Ole ;

Ross, Frances M. ;

Molhave, Kristian .

NANOTECHNOLOGY, 2020, 31 (49)

[2] In Situ Cryo-Electron Tomography: A Post-Reductionist Approach to Structural Biology [J].

Asano, Shoh ;

Engel, Benjamin D. ;

Baumeister, Wolfgang .

JOURNAL OF MOLECULAR BIOLOGY, 2016, 428 (02) :332-343

[3] Electron-beam induced recrystallization in amorphous apatite [J].

Bae, In-Tae ;

Zhang, Yanwen ;

Weber, William J. ;

Higuchi, Mikio ;

Giannuzzi, Lucille A. .

APPLIED PHYSICS LETTERS, 2007, 90 (02)

[4] In Situ TEM Observation of a Microcrucible Mechanism of Nanowire Growth [J].

Boston, Rebecca ;

Schnepp, Zoe ;

Nemoto, Yoshihiro ;

Sakka, Yoshio ;

Hall, Simon R. .

SCIENCE, 2014, 344 (6184) :623-626

[5] Crystallization of TiO2 Nanotubes by In Situ Heating TEM [J].

Casu, Alberto ;

Lamberti, Andrea ;

Stassi, Stefano ;

Falqui, Andrea .

NANOMATERIALS, 2018, 8 (01)

[6] Nanoscale Behavior and Manipulation of the Phase Transition in Single-Crystal Cu2Se [J].

Chen, Lu ;

Liu, Jun ;

Jiang, Chao ;

Zhao, Kunpeng ;

Chen, Hongyi ;

Shi, Xun ;

Chen, Lidong ;

Sun, Chenghua ;

Zhang, Shengbai ;

Wang, Yong ;

Zhang, Ze .

ADVANCED MATERIALS, 2019, 31 (04)

[7] Three-dimensional atomic mapping of hydrogenated polymorphous silicon solar cells [J].

Chen, Wanghua ;

Pareige, Philippe ;

Roca i Cabarrocas, Pere .

APPLIED PHYSICS LETTERS, 2016, 108 (25)

[8] Incorporation and redistribution of impurities into silicon nanowires during metal-particle-assisted growth [J].

Chen, Wanghua ;

Yu, Linwei ;

Misra, Soumyadeep ;

Fan, Zheng ;

Pareige, Philippe ;

Patriarche, Gilles ;

Bouchoule, Sophie ;

Cabarrocas, Pere Roca I. .

NATURE COMMUNICATIONS, 2014, 5

[9] Analytical Formula for the Electron Inelastic Mean Free Path [J].

Dai-Nam Le ;

Hieu T Nguyen-Truong .

JOURNAL OF PHYSICAL CHEMISTRY C, 2021, 125 (34) :18946-18951

[10] Basic questions related to electron-induced sputtering in the TEM [J].

Egerton, R. F. ;

McLeod, R. ;

Wang, F. ;

Malac, M. .

ULTRAMICROSCOPY, 2010, 110 (08) :991-997

← 1 2 3 4 5 →