Electric field induced piezoelectric resonance in the micrometer to millimeter waveband in a thin film SrTiO3 capacitor

被引：34

作者：

Morito, K ^{[1
]}

Iwazaki, Y ^{[1
]}

Suzuki, T ^{[1
]}

Fujimoto, M ^{[1
]}

机构：

[1] Taiyo Yuden Co Ltd, Haruna, Gunma 3703347, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2003年 / 94卷 / 08期

关键词：

D O I：

10.1063/1.1611268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin film SrTiO3 metal-insulator-metal (MIM) capacitors were fabricated in order to characterize the piezoelectric resonance in the micrometer to millimeter waveband arising from electric field induced ferroelectricity in the SrTiO3 film. The specimens showed a second-order phase transition, and the piezoelectric resonance appeared when an electric field of 250 kV/cm was applied at room temperature. Finite element method (FEM) analysis was used to interpret the piezoelectric resonance observed in the capacitors. The FEM analysis data basically agrees well with the experimental data, and the few differences between the theoretical and experimental data are interpreted mainly as artifacts caused by overlapping of resonant/antiresonant peaks during the measurement. The piezoelectric resonance of thin film MIM capacitors is strongly influenced by the longitudinal stacked structure of the MIM. (C) 2003 American Institute of Physics.

引用

页码：5199 / 5205

页数：7

共 36 条

[1] Phase diagrams and dielectric response of epitaxial barium strontium titanate films: A theoretical analysis [J].