Near-field photocurrent imaging of the optical mode profiles of semiconductor laser diodes

被引:8
作者
Guenther, T
Malyarchuk, V
Tomm, JW
Müller, R
Lienau, C
Luft, J
机构
[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany
[2] OSRAM Opto Semicond, D-93049 Regensburg, Germany
关键词
D O I
10.1063/1.1342206
中图分类号
O59 [应用物理学];
学科分类号
摘要
The potential of near-field photocurrent spectroscopy for direct imaging of mode profiles of submicron-sized waveguides in optoelectronic devices is demonstrated. The technique combines the submicron spatial resolution of near-field optics with tunable laser excitation, allowing for selective investigation of the waveguide properties of the device structure. Experiments on InGaAs/AlGaAs high-power laser diodes with different waveguide designs provide direct visualization of the effect of the waveguide design on (i) the number of guided modes and (ii) the spatial profile of both fundamental and higher-order modes. The technique thus provides a sensitive tool for nondestructive in situ analysis of waveguide properties in optoelectronic devices. (C) 2001 American Institute of Physics.
引用
收藏
页码:1463 / 1465
页数:3
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