Evidence for breathing modes in direct current, pulsed, and high power impulse magnetron sputtering plasmas

被引：20

作者：

Yang, Yuchen ^{[1
,2
]}

Zhou, Xue ^{[2
,3
]}

Liu, Jason X. ^{[2
,4
]}

Anders, Andre ^{[2
]}

机构：

[1] Huazhong Univ Sci & Technol, Sch Mat Sci & Engn, State Key Lab Mat Proc & & Mold Technol, Wuhan 430074, Peoples R China

[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, 1 Cyclotron Rd, Berkeley, CA 94720 USA

[3] Harbin Inst Technol, Dept Elect Engn, Harbin 150000, Peoples R China

[4] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 2016年 / 108卷 / 03期

关键词：

HALL THRUSTERS; OSCILLATIONS; DISCHARGE;

D O I：

10.1063/1.4939922

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present evidence for breathing modes in magnetron sputtering plasmas: periodic axial variations of plasma parameters with characteristic frequencies between 10 and 100 kHz. A set of azimuthally distributed probes shows synchronous oscillations of the floating potential. They appear most clearly when considering the intermediate current regime in which the direction of azimuthal spoke motion changes. Breathing oscillations were found to be superimposed on azimuthal spoke motion. Depending on pressure and current, one can also find a regime of chaotic fluctuations and one of stable discharges, the latter at high current. A pressure-current phase diagram for the different situations is proposed. (C) 2016 AIP Publishing LLC.

引用

页数：4

共 22 条

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