Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy

被引：3

作者：

Yamanaka, K ^{[1
]}

Tsuji, T ^{[1
]}

Irihama, H ^{[1
]}

Mihara, T ^{[1
]}

机构：

[1] Tohoku Univ, Dept Mat Proc, Sendai, Miyagi 980, Japan

来源：

TESTING, RELIABILITY, AND APPLICATION OF MICRO- AND NANO-MATERIAL SYSTEMS | 2003年 / 5045卷

关键词：

ultrasonic atomic force microscopy; linear vibration; nonlinear vibration; nano-scale crack; opening-and-closing behavior; nondestructive evaluation;

D O I：

10.1117/12.483823

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. It was proved that the proposed methods are useful for evaluating the crack closure/opening on the nano-scale.

引用

页码：104 / 111

页数：8

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