X-Y positioner driven by electrostatic motor

被引：0
|
作者：
Niino, T [1 ]
Ban, T [1 ]
Yamamoto, A [1 ]
Higuchi, T [1 ]
机构：
[1] RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN
来源：
IAS '96 - CONFERENCE RECORD OF THE 1996 IEEE INDUSTRY APPLICATIONS CONFERENCE, THIRTY-FIRST IAS ANNUAL MEETING, VOLS 1-4 | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1974 / 1979
页数：6
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