Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy

被引:1
作者
Baldacchini, Tommaso [1 ]
Zimmerley, Max [2 ]
Potma, Eric O. [2 ]
Zadoyan, Ruben [1 ]
机构
[1] Newport Corp, Technol & Applicat Ctr, 1791 Deere Ave, Irvine, CA 92606 USA
[2] Univ Calif Irvine, Dept Chem, Irvine, CA 92697 USA
来源
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VII | 2009年 / 7201卷
关键词
photopolymerization; microfabrication; coherent anti-Stokes Raman scattering; vibrational imaging;
D O I
10.1117/12.808269
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as photonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of nonlinear microscopy. In particular, coherent anti-Stokes Raman scattering (CARS) microscopy is employed to image polymer microstructures with chemical specificity. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process.
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页数:10
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