A method to determine electron mobility of the two-dimensional electron gas in AlGaN/GaN heterostructure field-effect transistors

被引:11
|
作者
Cui, Peng [1 ]
Lin, Zhaojun [1 ]
Fu, Chen [1 ]
Liu, Yan [1 ]
Lv, Yuanjie [2 ]
机构
[1] Shandong Univ, Sch Microelect, Jinan 250100, Shandong, Peoples R China
[2] Hebei Semicond Res Inst, Natl Key Lab Applicat Specif Integrated Circuit A, Shijiazhuang 050051, Hebei, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/GaN HFETs; Electron mobility; Transconductance; Polarization Coulomb field scattering; HEMT DEVICES; CONTACTS;
D O I
10.1016/j.spmi.2017.08.030
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Taking into consideration the resistance variation in the free-contact area versus the gate bias, an applicable method to determine the electron mobility in AlGaN/GaN heterostructure field-effect transistors was presented. Based on the measured capacitance voltage and current-voltage curves, the new method employed iteration calculation with different scattering mechanisms. Compared to the electron mobility calculated by the traditional method, the electron mobility calculated by the new method shows an apparent difference, especially for the device with a larger gate length. This difference originates from the device with a larger gate length that has a stronger polarization Coulomb field scattering. At last, the correctness and necessity of this method was demonstrated by the comparison between the experimental and calculated trans conductance values. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码:289 / 295
页数:7
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