Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge

被引：13

作者：

Grzebyk, Tomasz ^{[1
]}

Gorecka-Drzazga, Anna ^{[1
]}

Dziuban, Jan A. ^{[1
]}

Maamari, Khodr ^{[2
]}

An, Seyoung ^{[2
]}

Dankovic, Tatjana ^{[2
]}

Feinerman, Alan ^{[2
]}

Busta, Heinz ^{[2
]}

机构：

[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland

[2] Univ Illinois, Dept Elect & Comp Engn, Chicago, IL 60607 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2015年 / 33卷 / 03期

关键词：

BRIDGE; GLASS;

D O I：

10.1116/1.4903448

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper concerns the problems associated with the generation and measurement of vacuum in small-volume microelectromechanical (MEMS) devices. A concept of equipping vacuum MEMS with miniature vacuum pump and gauge has been presented. The ion-sorption vacuum micropump developed by the authors has been integrated with two "external" miniature pressure sensors: a specially developed miniature Bayard-Alpert gauge and a MEMS-type Pirani sensor. The pressure during the pumping process was in-situ measured and co-work of vacuum micropump and sensors has been investigated. The experimental results confirmed good pumping properties of the micropump, but indicated that the work of micropump significantly affects the operation of vacuum sensors and vice versa. (C) 2014 American Vacuum Society.

引用

页数：6

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