Optical properties of high refractive index thin films processed at low-temperature

被引：57

作者：

Oubaha, Mohamed ^{[1
]}

Elmaghrum, Salem ^{[2
]}

Copperwhite, Robert ^{[1
]}

Corcoran, Brian ^{[2
]}

McDonagh, Colette ^{[1
,3
]}

Gorin, Arnaud ^{[1
]}

机构：

[1] Dublin City Univ, Natl Ctr Sensor Res, Opt Sensors Lab, Dublin 9, Ireland

[2] Dublin City Univ, Sch Mech & Mfg Engn, Dublin 9, Ireland

[3] Dublin City Univ, BDI, Dublin 9, Ireland

来源：

OPTICAL MATERIALS | 2012年 / 34卷 / 08期

关键词：

Sol-gel; Hybrid materials; High refractive index; Optics; Photonics; Thin films; PLANAR WAVE-GUIDES; SILICON SOLAR-CELLS; TANTALUM OXIDE; GEL PROCESS;

D O I：

10.1016/j.optmat.2012.02.023

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study reports on the first development of high refractive index thin film materials processed at temperatures not greater than 100 degrees C. Three materials were synthesised by the sol-gel technique, each employing different transition metal precursors (niobium, tantalum and vanadium alkoxides). The optical properties of these materials were characterised by ellipsometry and the propagation losses at 638 nm were measured by the prism coupling method. It is shown that refractive indices as high as 1.870, 2.039 and 2.308 are obtained from niobium-, tantalum- and vanadium-based materials respectively, attributed to the influence of the transition metal atomic size on the condensation reactions. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：1366 / 1370

页数：5

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