Monolithic integration of micro-channel on disposable flow sensors for medical applications

被引：17

作者：

Billat, S. ^{[1
]}

Kliche, K. ^{[1
]}

Gronmaier, R. ^{[1
]}

Nommensen, P. ^{[1
]}

Auber, J. ^{[1
]}

Hedrich, F. ^{[1
]}

Zengerle, R. ^{[1
]}

机构：

[1] HSG IMIT, D-78052 Villingen Schwenningen, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 145卷

关键词：

flow sensor; integration of micro-channel; adhesive-free packaging; low measurement range;

D O I：

10.1016/j.sna.2007.10.059

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the integration of a micro-flow channel with a thermal flow sensor chip. Two different technologies were investigated: first the fluid channel is performed at the back side of the standard HSG-IMIT flow sensor chip using a double KOH etching process (DKOH). The second technology consists of a bond process between the flow sensor die and a polydimethylsiloxane (PDMS) sheet containing the channel. Both sensor types can be used for detecting flow rates in the range of 0.1-5.0 mu l/min (H2O) and/or pressure differences of 10-600 Pa. Compared to our previous sensor design this leads to reduced packaging costs, increased reproducibility (better than 1%) and in particular a higher sensitivity at low flow rates. Finally a concept of an adhesive-free packaging of the sensor is presented. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：66 / 74

页数：9

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