Analysis and testing of a silicon intrinsic-point heater in a micropropulsion application

被引:24
作者
Bayt, RL [1 ]
Breuer, KS
机构
[1] United Technol Res Ctr, E Hartford, CT USA
[2] Brown Univ, Div Engn, Providence, RI 02912 USA
关键词
microheater; micropropulsion; MEMS; deep reactive ion etching;
D O I
10.1016/S0924-4247(01)00594-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Efficient heating of a fluid is demonstrated using a novel heat exchanger in which bulk Silicon forms both the heater structure and the resistive heating elements. Current passed through the heater raises the temperature of the heater fins and this energy is transferred to a fluid flowing between adjacent fins. By exploiting the change in sign of the temperature coefficient of resistivity of the heavily doped silicon, the temperature of the system is stably maintained at the intrinsic point. A heat exchanger of this nature is integrated with a nozzle, resulting in a microthruster with elevated chamber temperature, which greatly improves the specific impulse, or thrust per unit weight flow of propellant. A numerical model is presented to optimize the heater design. Benchtop tests demonstrate the inherent stability of the intrinsic point heater design, while thrust tests demonstrate the improved fuel economy of the micropropulsion system. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:249 / 255
页数:7
相关论文
共 10 条
[1]  
[Anonymous], 2000, PROGR ASTRONAUT AERO
[2]  
[Anonymous], 1999, THESIS MIT
[3]  
Bayt R. L., 1998, Technical Digest. Solid-State Sensor and Actuator Workshop, P312
[4]   THERMALLY DRIVEN PHASE-CHANGE MICROACTUATION [J].
BERGSTROM, PL ;
JI, J ;
LIU, YN ;
KAVIANY, M ;
WISE, KD .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1995, 4 (01) :10-17
[5]  
HENNING AK, P INT SOL STAT SENS, P825
[6]  
JANSON SW, 1997, P INT EL PROP C IEPC
[7]  
JENSEN K, 1996, P 1996 SOL STAT SENS, P15
[8]  
KAKAC RK, 1983, LOW REYNOLDS NUMBER
[9]   ELECTRICAL PROPERTIES OF PURE SILICON AND SILICON ALLOYS CONTAINING BORON AND PHOSPHORUS [J].
PEARSON, GL ;
BARDEEN, J .
PHYSICAL REVIEW, 1949, 75 (05) :865-883
[10]  
White F. M., 1974, VISCOUS FLUID FLOW