Atomic force microscopy characterization of electromechanical properties of RF acoustic bulk wave resonators

被引：5

作者：

San Paulo, A ^{[1
]}

Liu, X ^{[1
]}

Bokor, J ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensors & Actuators Grp, Berkeley, CA 94720 USA

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290549

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we demonstrate the ability of Atomic Force Microscopy (AFM) in combination with a lock-in detection technique for the characterization of the electromechanical properties of acoustic bulk wave resonators. In particular, this method is applied to study the mechanical frequency response and the acoustic mode shapes of the Agilent Technologies' Film Bulk Acoustic Resonator (FBAR). The mechanical resonance frequencies of the FBARs in the GHz range are measured in air, and the shape of the acoustic modes is obtained over, 100 x 100 mum areas with nanometer-scale lateral resolution and angstrom-scale vertical resolution.

引用

页码：169 / 172

页数：4

共 15 条

[1] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[2] Piezoelectric measurements with atomic force microscopy [J].

Christman, JA ;

Woolcott, RR ;

Kingon, AI ;

Nemanich, RJ .

APPLIED PHYSICS LETTERS, 1998, 73 (26) :3851-3853

[3] Modified Mach-Zender laser interferometer for probing bulk acoustic waves [J].

Fattinger, GG ;

Tikka, PT .

APPLIED PHYSICS LETTERS, 2001, 79 (03) :290-292

[4] Dynamic visualization of subangstrom high-frequency surface vibrations [J].

Graebner, JE ;

Barber, BP ;

Gammel, PL ;

Greywall, DS ;

Gopani, S .

APPLIED PHYSICS LETTERS, 2001, 78 (02) :159-161

[5] High resolution visualization of acoustic wave fields within surface acoustic wave devices [J].

Hesjedal, T ;

Chilla, E ;

Frohlich, HJ .

APPLIED PHYSICS LETTERS, 1997, 70 (11) :1372-1374

[6] High-resolution imaging of surface acoustic wave scattering [J].

Hesjedal, T ;

Behme, G .

APPLIED PHYSICS LETTERS, 2001, 78 (13) :1948-1950

[7] Time and frequency response of two-arm micromachined thermal actuators [J].

Hickey, R ;

Sameoto, D ;

Hubbard, T ;

Kujath, M .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (01) :40-46

[8]

Larson JD, 2000, ULTRASON, P869, DOI 10.1109/ULTSYM.2000.922680

[9] CHARACTERIZATION OF TIPS FOR CONDUCTING ATOMIC-FORCE MICROSCOPY [J].

OSHEA, SJ ;

ATTA, RM ;

WELLAND, ME .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (03) :2508-2512

[10] PCS 1900MHz duplexer using thin film bulk acoustic resonators (FBARs) [J].

Ruby, R ;

Bradley, P ;

Larson, JD ;

Oshmyansky, Y .

ELECTRONICS LETTERS, 1999, 35 (10) :794-795

← 1 2 →