Origin of Waveguiding in Ultrashort Pulse Structured Silicon

被引：13
作者：
Kaemmer, Helena [1 ]
Matthaeus, Gabor [1 ]
Lammers, Kim A. [1 ]
Vetter, Christian [1 ]
Chambonneau, Maxime [1 ]
Nolte, Stefan [1 ,2 ]
机构：
[1] Friedrich Schiller Univ Jena, Abbe Ctr Photon, Inst Appl Phys, Albert Einstein Str 15, D-07745 Jena, Germany
[2] Fraunhofer Inst Appl Opt & Precis Engn, Albert Einstein Str 7, D-07745 Jena, Germany
来源：
LASER & PHOTONICS REVIEWS | 2019年 / 13卷 / 02期
关键词：
laser inscription; raman microscopy; silicon waveguide; ultrashort pulses; OPTICAL-PROPERTIES; CRYSTALLINE SILICON; LASER; GUIDES; INSCRIPTION; SI;
D O I：
10.1002/lpor.201800268
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The origin of waveguiding in the bulk of silicon after sub-ps laser inscription is investigated. Locally resolved Raman measurements of waveguide cross sections and along the propagation axis reveal highly localized crystal deformations. These modifications consist of highly confined regions of silicon with a disturbed crystal structure accompanied with strain. This transformation is responsible for a local increase of the refractive index allowing localized waveguiding. On the basis of near-field measurements at an excitation wavelength of 1550 nm, the absolute value of the refractive index change is estimated to be in the range of 10(-3).
引用
收藏
页数：5
相关论文
共 38 条
  • [1] Microstructure and photovoltaic performance of polycrystalline silicon thin films on temperature-stable ZnO:Al layers
    Becker, C.
    Ruske, F.
    Sontheimer, T.
    Gorka, B.
    Bloeck, U.
    Gall, S.
    Rech, B.
    [J]. JOURNAL OF APPLIED PHYSICS, 2009, 106 (08)
  • [2] Ultrafast laser direct writing and nanostructuring in transparent materials
    Beresna, Martynas
    Gecevicius, Mindaugas
    Kazansky, Peter G.
    [J]. ADVANCES IN OPTICS AND PHOTONICS, 2014, 6 (03): : 293 - 339
  • [3] Femtosecond laser-induced refractive index modification in multicomponent glasses
    Bhardwaj, VR
    Simova, E
    Corkum, PB
    Rayner, DM
    Hnatovsky, C
    Taylor, RS
    Schreder, B
    Kluge, M
    Zimmer, J
    [J]. JOURNAL OF APPLIED PHYSICS, 2005, 97 (08)
  • [4] Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy
    Bonse, J
    Brzezinka, KW
    Meixner, AJ
    [J]. APPLIED SURFACE SCIENCE, 2004, 221 (1-4) : 215 - 230
  • [5] Influence of microstructure and hydrogen concentration on amorphous silicon crystallization
    Budini, N.
    Rinaldi, P. A.
    Schmidt, J. A.
    Arce, R. D.
    Buitrago, R. H.
    [J]. THIN SOLID FILMS, 2010, 518 (18) : 5349 - 5354
  • [6] Strain induced bandgap and refractive index variation of silicon
    Cai, Jingnan
    Ishikawa, Yasuhiko
    Wada, Kazumi
    [J]. OPTICS EXPRESS, 2013, 21 (06): : 7162 - 7170
  • [7] Crossing the threshold of ultrafast laser writing in bulk silicon
    Chanal, Margaux
    Fedorov, Vladimir Yu.
    Chambonneau, Maxime
    Clady, Raphael
    Tzortzakis, Stelios
    Grojo, David
    [J]. NATURE COMMUNICATIONS, 2017, 8
  • [8] Optical waveguides in crystalline dielectric materials produced by femtosecond- laser micromachining
    Chen, Feng
    Vazquez de Aldana, J. R.
    [J]. LASER & PHOTONICS REVIEWS, 2014, 8 (02) : 251 - 275
  • [9] Sub-damage-threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation
    Costache, F
    Kouteva-Arguirova, S
    Reif, J
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (4-6): : 1429 - 1432
  • [10] Writing waveguides in glass with a femtosecond laser
    Davis, KM
    Miura, K
    Sugimoto, N
    Hirao, K
    [J]. OPTICS LETTERS, 1996, 21 (21) : 1729 - 1731
1234