Oxygen diffusion was measured at oxygen/cathode/electrolyte interfaces and at oxide scales/alloy interconnects in Solid Oxide Fuel Cells (SOFCs). A stable isotope oxygen exchange technique (O-16/O-18 exchange) was adopted to label the diffusion profiles in the oxides, and secondary ion mass spectrometry (SIMS) depth profiles were examined to determine the diffusion coefficients in the oxide ceramic materials. Diffusivity of oxygen in LaMnO3 cathode was measured under polarized condition (that is, considering the electrochemical process and diffusion). Also, oxygen diffusion in the oxide scales formed on the alloy was measured to clarify the formation mechanism of oxide scale.