Surface Profiling and Characterization of Microlenses Utilizing a Shack-Hartmann Wavefront Sensor

被引：0
作者：
Li, Chenhui [1 ]
Hall, Gunnsteinn [1 ]
Aldalali, Bader [1 ]
Zhu, Difeng [1 ]
Eliceiri, Kevin [1 ]
Jiang, Hongrui [1 ]
机构：
[1] Univ Wisconsin, Madison, WI 53706 USA
来源：
OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2011年
关键词：
three-dimensional; surface profile; Shack-Hartmann wavefront sensor; liquid microlens;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the characterization of microlenses utilizing the three-dimensional (3D) surface profile obtained from a Shack-Hartmann wavefront sensor. This method can be applied to most types of microlenses, especially liquid ones. Both a solid and a liquid microlens were characterized. The surface data was analyzed and then exported into Zemax to compute their optical properties. The wavefront error of the liquid lens tested increased from 0.44 to 2.41 waves as its focal length was tuned from 10.1 to 4.3 mm. The surface profiles can also be used to study the effect of gravity on microlenses and surface wetting for optimizing the lens fabrication procedure.
引用
收藏
页码：185 / 186
页数：2
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