A cost-effective solution for packaging the arrayed waveguide grating (AWG) photonic components

被引:0
作者
Zhang, ZY [1 ]
Xiao, GZ
Liu, JR
Grover, CP
Nikumb, S
Reshef, HW
机构
[1] Natl Res Council Canada, Inst Natl Measurement Stand, Photon Syst Grp, Ottawa, ON K1A 0R6, Canada
[2] Natl Res Council Canada, Integrated Mfg Technol Inst, Precis Fabricat Proc Grp, London, ON N4G 4X8, Canada
来源
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES | 2005年 / 28卷 / 03期
关键词
arrayed waveguide grating (AWG); laser cutting; packaging; photonic components;
D O I
10.1109/TCAPT.2005.848582
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Precision laser machining technology was used to cut arrayed waveguide grating (AWG) devices from 6-in wafers by following their complex profiles in a fully automatic way. A substantial cost saving in components manufacturing was achieved by an obtained device-cutting yield of 100%. The profile-cut AWG devices have smooth cutting edges and their optical performances were found unaffected by the cutting. These devices were processed in the subsequent packaging process easily without adding cost. They were proven mechanically stable in their packaging in meeting the telecommunication standards even though they have irregular geometry.
引用
收藏
页码:564 / 570
页数:7
相关论文
共 16 条
  • [1] BROWN WD, 1998, ADV ELECT PACKAGING
  • [2] Low loss and high extinction ratio strictly nonblocking 16 x 16 thermooptic matrix switch on 6-in wafer using silica-based planar lightwave circuit technology
    Goh, T
    Yasu, M
    Hattori, K
    Himeno, A
    Okuno, M
    Ohmori, Y
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2001, 19 (03) : 371 - 379
  • [3] HIGH-RELIABILITY OPTICAL SPLITTERS COMPOSED OF SILICA-BASED PLANAR LIGHTWAVE CIRCUITS
    HIBINO, Y
    HANAWA, F
    NAKAGOME, H
    ISHII, M
    TAKATO, N
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1995, 13 (08) : 1728 - 1735
  • [4] Silica-based planar lightwave circuits
    Himeno, A
    Kato, K
    Miya, T
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1998, 4 (06) : 913 - 924
  • [5] Athermal silica-based arrayed-waveguide grating (AWG) multi/demultiplexers with new low loss groove design
    Kaneko, A
    Kamei, S
    Inoue, Y
    Takahashi, H
    Sugita, A
    [J]. ELECTRONICS LETTERS, 2000, 36 (04) : 318 - 319
  • [6] LI YP, 1999, Patent No. 5881199
  • [7] Silica-based planar lightwave circuits: Passive and thermally active devices
    Miya, T
    [J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (01) : 38 - 45
  • [8] 16-channel optical add/drop multiplexer consisting of arrayed-waveguide gratings and double-gate switches
    Okamoto, K
    Okuno, M
    Himeno, A
    Ohmori, Y
    [J]. ELECTRONICS LETTERS, 1996, 32 (16) : 1471 - 1472
  • [9] BIREFRINGENCE CONTROL OF SILICA WAVE-GUIDES ON SI AND ITS APPLICATION TO A POLARIZATION-BEAM SPLITTER SWITCH
    OKUNO, M
    SUGITA, A
    JINGUJI, K
    KAWACHI, M
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (04) : 625 - 633
  • [10] A new method of birefringence measurements using a Faraday modulator. Application to measurements of stress-optical coefficients
    Sahsah, H
    Djendli, S
    Monin, J
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2000, 11 (03) : N46 - N50