Compositional analysis and optical properties of Ag-doped ITO films

被引：6

作者：

Cao, Chunbin ^{[1
,2
,3
]}

Zhou, Aiyu ^{[2
]}

Mu, Shuhui ^{[2
]}

Zhang, Guoshun ^{[2
]}

Song, Xueping ^{[1
]}

Sun, Zhaoqi ^{[1
]}

机构：

[1] Anhui Univ, Sch Phys & Mat Sci, Hefei 230036, Peoples R China

[2] Anhui Agr Univ, Sch Sci, Hefei 230036, Peoples R China

[3] Minist Educ, Key Lab Optoelect Informat Acquisit & Manipulat, Hefei 230036, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2011年 / 176卷 / 18期

基金：

中国国家自然科学基金; 高等学校博士学科点专项科研基金;

关键词：

ITO film; Ag-doping; XPS; Optical constants; OXIDE THIN-FILMS; INDIUM; DEPOSITION; COATINGS; OXYGEN; GLASS;

D O I：

10.1016/j.mseb.2011.07.027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

ITO and Ag-ITO composite films were deposited on glass substrates by DC magnetron sputtering. Scanning electron microscope images indicated that Ag existed in the form of nanoparticles. X-ray photoelectron spectroscopic analysis illustrated that both Ag doping and heat treatment had obvious influence on the composition and element chemical state of the films. Ag doping dramatically decreased the transmittance of the film. But after being annealed, Ag-ITO films exhibited the high average transmittance of 80-90% in visible wavelength range. By using the spectroscopic ellipsometry optimization, the optical constants were extracted from the transmittance spectra. The results suggested the potential use of Ag-ITO films for antireflection coating system. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：1430 / 1434

页数：5

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