In-situ formation, structural transformation and mechanical properties Cr-N coatings prepared by MPCVD

被引:16
作者
Xia, Yu [1 ,3 ,4 ]
Xu, Zhigang [2 ,3 ,4 ]
Peng, Jian [1 ]
Shen, Qiang [1 ]
Wang, Chuanbin [1 ]
机构
[1] Wuhan Univ Technol, State Key Lab Adv Technol Mat Synth & Proc, Wuhan 430070, Peoples R China
[2] Wuhan Univ Technol, Hubei Key Lab Adv Technol Automot Components, Wuhan 430070, Peoples R China
[3] Chaozhou Branch Chem, Chaozhou 521000, Guangdong, Peoples R China
[4] Chem Engn Guangdong Lab, Chaozhou 521000, Guangdong, Peoples R China
基金
国家重点研发计划;
关键词
Cr; N coating; Microwave plasma chemical vapor deposition; Structural transformation; Mechanical properties; TRIBOLOGICAL BEHAVIOR; WEAR PROPERTIES; HARD-CHROME; PERFORMANCE; NITROGEN; FILMS; NANOINDENTATION; MICROSTRUCTURE; FABRICATION; ADHESION;
D O I
10.1016/j.surfcoat.2022.128522
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This study innovatively employed the microwave plasma chemical vapor deposition (MPCVD) technique to fabricate Cr-N coatings. The influence of preparation temperature on chemical composition, crystalline phase, morphology, and mechanical properties of the coatings were analyzed systematically. The increase of preparation temperature resulted in the structural transformation of the Cr-N coatings from the duplex of Cr2N/CrN to the single-phased Cr2N. The coatings with dense and flat surface were obtained at <= 800 degrees C; however, the decomposition of CrN to Cr2N and N2 led to the formation of pores at >= 850 degrees C and consequently an increase in friction coefficient and wear. The hardness and elastic modulus increased with increasing temperature because of the structural evolution of the Cr-N coating and phase transformation. 800 degrees C was the optimal preparation temperature as the coating exhibited a dense surface and possessed the best overall mechanical properties.
引用
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页数:9
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