[3] Natl Tsing Hua Univ, Dept Power Engn, 101,Sec 2,Kuang Fu Rd, Hsinchu 30013, Taiwan
来源:
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
|
2020年
/
26卷
/
04期
关键词:
BEAM;
SWITCH;
D O I:
10.1007/s00542-019-04637-3
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Micro-actuator has applied on the microrobotics, microfluidics et al. widely. In general, to obtain the maximum output force is the designed requirement of electro-thermal actuator. However, the displacement for the force output will result in the stress concentration. The important issue is to reduce the failure of the electro-thermal actuator resulted from the stress concentration. This paper proposes an optimal process that involves using the finite element method and genetic algorithm to maximize the displacement and output force and minimize the stress concentration for enhancing the performance of an electro-thermal micro-actuator. The results were validated by comparing the simulated results of a previous study. Geometric design parameters were used for determining the displacement, output force, and stress concentration. The optimal design was proved to increase the life expectancy of micro-actuator.
机构:
Univ Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, BrazilUniv Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, Brazil
de Godoy, Paulo Henrique
Nelli Silva, Emilio Carlos
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, BrazilUniv Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, Brazil
机构:
Orbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, IsraelOrbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, Israel
Kotler, Z.
Zalevsky, Z.
论文数: 0引用数: 0
h-index: 0
机构:
Bar Ilan Univ, Fac Engn, IL-52900 Ramat Gan, Israel
Bar Ilan Univ, Nanotechnol Ctr, IL-52900 Ramat Gan, IsraelOrbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, Israel
机构:
Univ Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, BrazilUniv Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, Brazil
de Godoy, Paulo Henrique
Nelli Silva, Emilio Carlos
论文数: 0引用数: 0
h-index: 0
机构:
Univ Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, BrazilUniv Sao Paulo, Escola Politecn, Dept Mechatron & Mech Syst Eng, BR-05508900 Sao Paulo, Brazil
机构:
Orbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, IsraelOrbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, Israel
Kotler, Z.
Zalevsky, Z.
论文数: 0引用数: 0
h-index: 0
机构:
Bar Ilan Univ, Fac Engn, IL-52900 Ramat Gan, Israel
Bar Ilan Univ, Nanotechnol Ctr, IL-52900 Ramat Gan, IsraelOrbotech Ltd, Addit Mfg Lab, POB 215, IL-81101 Yavne, Israel