Numerical investigation of fluidic micro-oscillators

被引:35
作者
Gebhard, U
Hein, H
Schmidt, U
机构
[1] Forschungszentrum Karlsruhe, Inst. für Mikrostrukturtechnik, D-76021 Karlsruhe
关键词
D O I
10.1088/0960-1317/6/1/028
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A fluidic micro-oscillator operated with water, which can be used to control a linear tool was designed and simulated using finite element methods (FEM). In order to adjust the performance of the fluidic oscillator to the tool, a basic oscillator design was varied in terms of supply nozzle geometry and length of the feedback channels. It was found that characteristic parameters such as frequency, volume flow and output pressure depend strongly on the nozzle geometry, while with the lengthening of the feedback channels only the oscillation ability deteriorated. This led to the conclusion that in the case of micro-oscillators the period of oscillation is mainly determined by the switching time from one attachment wall to another, which is dependent on the flowrate, while the transmission time through the feedback channels, which is determined by the sonic speed.
引用
收藏
页码:115 / 117
页数:3
相关论文
共 3 条
[1]  
[Anonymous], 1975, DESIGN THEORY FLUIDI
[2]  
Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
[3]  
GEBHARD U, 1995, P INT S MICR INT MAT, P41