The study of fabrication of the x-ray mirror by numerically controlled plasma chemical vaporization machining: Development of the machine for the x-ray mirror fabrication

A numerically controlled plasma chemical vaporization machining (CVM) machine has been developed in order to fabricate ultrahigh accuracy x-ray mirror efficiently without making the deformed layer. In this machine, a gas bearing was applied to both of the rotary electrode for plasma generation and an XY table in order to maintain the cleanliness of the machining atmosphere. A silicon flat mirror for the x-ray was made by using developed machine. A value of 22.5 nm (p-v) was achieved as flatness. The CVM technique is more fully described in the accompanying article in this issue. (C) 2000 American Institute of Physics. [S0034-6748(00)03012-4].