Burst mode with ps- and fs-pulses: Influence on the removal rate, surface quality and heat accumulation

被引:64
作者
Neuenschwander, B. [1 ]
Kramer, Th. [1 ]
Lauer, B. [1 ]
Jaeggi, B. [1 ]
机构
[1] Bern Univ Appl Sci, Inst Appl Laser Photon & Surface Technol, CH-3400 Burgdorf, Switzerland
来源
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XX | 2015年 / 9350卷
关键词
burst mode; heat accumulation; surface quality; micromachining; ultra; short pulses; ABLATION; EFFICIENCY;
D O I
10.1117/12.2076455
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The burst mode for ps and fs pulses for steel and copper is investigated. It is found that the reduction of the energy in a single pulse (in the burst) represents the main factor for the often reported gain in the removal rate using the burst mode e. g. for steel no investigated burst sequence lead to a higher removal rate compared to single pulses at higher repetition rate. But for copper a situation was found where the burst mode leads to a real increase of the removal rate in the range of 20%. Further the burst mode offers the possibility to generate slightly melted flat surfaces with good optical properties in the case of steel. Temperature simulations indicate that the surface state during the burst mode could be responsible for the melting effect or the formation of cavities in clusters which reduces the surface quality.
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页数:14
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