Investigation of metal-coating-assisted IR nanosecond pulsed laser ablation of CVD diamond

被引:17
作者
Chen, Ni [1 ]
Wang, Runkai [1 ]
Nagarajan, Balasubramanian [2 ]
Yan, Bo [1 ]
Wu, Yang [1 ]
He, Ning [1 ]
Castagne, Sylvie [2 ]
机构
[1] Nanjing Univ Aeronaut & Astronaut, Jiangsu Key Lab Precis & Micromfg Technol, Nanjing 210016, Peoples R China
[2] KU Leuven MaPS, Dept Mech Engn & Flanders Make, B-3001 Leuven, Belgium
来源
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T | 2022年 / 18卷
基金
中国国家自然科学基金;
关键词
CVD diamond; Titanium coating; Laser ablation; Nanosecond pulsed laser; FILM THICKNESS; THIN-FILMS; SURFACE; TI; GRAPHITIZATION;
D O I
10.1016/j.jmrt.2022.04.072
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Laser ablation is demonstrated to be a competent approach to processing chemical vapor deposition (CVD) diamond which is admitted to own poor machinability and is accordingly arduous to machine using conventional techniques. Notwithstanding, initial laser ab-sorption by defects typically precipitates undesirable ablation quality and an increment in internal defects. The strategy of metal-coating-assisted laser ablation, which applies a coating on the diamond prior to laser irradiation to curtail defects and advance the quality of the ablated surface, is proposed in this study. In addition, an absorptivity-based laser energy distribution model is established to evaluate surface roughness and ablation depth. It can be concluded that the metal coating prevents local graphitization during the early ablation stage. The laser ablation of Ti-coated diamond surfaces resulted in a maximum reduction in surface roughness of 42.6% and 53%, respectively, for 100 and 500 nm coating, in comparison to that with the uncoated surfaces. Besides, the ablation depth of the laser-ablated 500 nm coating surface abates and reaches 21% in comparison with the uncoated diamond, while the 100 nm coating has a negligible effect on the ablation depth. In sum-mary, the application of thin coatings on diamond prior to laser ablation results in ho-mogeneous graphitization and a better surface finish with a marginal reduction in ablation depth.(c) 2022 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/).
引用
收藏
页码:4114 / 4129
页数:16
相关论文
共 35 条
[1]   Laser induced nano-graphite electrical contacts on synthetic polycrystalline CVD diamond for nuclear radiation detection [J].
Alemanno, E. ;
Martino, M. ;
Caricato, A. P. ;
Corrado, M. ;
Pinto, C. ;
Spagnolo, S. ;
Chiodini, G. ;
Perrino, R. ;
Fiore, G. .
DIAMOND AND RELATED MATERIALS, 2013, 38 :32-35
[2]   Improvement in electrical conductivity characterization of chitosan/Poly (ethylene oxide) incorporated with V2O5 NPs via laser ablation [J].
Awwad, Nasser S. S. ;
Ibrahium, Hala A. A. ;
Abd El-Kader, M. F. H. ;
Ali, H. Elhosiny ;
Mostafa, Ayman M. M. ;
Menazea, A. A. .
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2022, 16 :1272-1282
[3]   Surface structure and composition of flat titanium thin films as a function of film thickness and evaporation rate [J].
Cai, KY ;
Müller, M ;
Bossert, J ;
Rechtenbach, A ;
Jandt, KD .
APPLIED SURFACE SCIENCE, 2005, 250 (1-4) :252-267
[4]   Advances in micro milling: From tool fabrication to process outcomes [J].
Chen, Ni ;
Li, Hao Nan ;
Wu, Jinming ;
Li, Zhenjun ;
Li, Liang ;
Liu, Gongyu ;
He, Ning .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2021, 160
[5]   Investigating the ablation depth and surface roughness of laser-induced nano-ablation of CVD diamond material [J].
Chen, Ni ;
Li, Zhenjun ;
Wu, Yang ;
Zhao, Guolong ;
Li, Liang ;
He, Ning .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2019, 57 :220-228
[6]   Characterization of surface graphitic electrodes made by excimer laser on CVD diamond [J].
De Feudis, M. ;
Caricato, A. P. ;
Chiodini, G. ;
Martino, M. ;
Alemanno, E. ;
Maruccio, G. ;
Monteduro, A. G. ;
Ossi, P. M. ;
Perrino, R. ;
Spagnolo, S. .
DIAMOND AND RELATED MATERIALS, 2016, 65 :137-143
[7]   Ablation study of WC and PCD composites using 10 picosecond and 1 nanosecond pulse durations at green and infrared wavelengths [J].
Eberle, Gregory ;
Wegener, Konrad .
8TH INTERNATIONAL CONFERENCE ON LASER ASSISTED NET SHAPE ENGINEERING (LANE 2014), 2014, 56 :951-962
[8]   Growth mechanism and optical properties of Ti thin films deposited onto fluorine-doped tin oxide glass substrate [J].
Einollahzadeh-Samadi, Motahareh ;
Dariani, Reza S. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2015, 33 (02)
[9]   Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond [J].
Ferrari, AC ;
Robertson, J .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2004, 362 (1824) :2477-2512
[10]   Laser structuring of the diamond surface in the nanoablation regime [J].
Gololobov, V. M. ;
Kononenko, V. V. ;
Konov, V. I. .
QUANTUM ELECTRONICS, 2016, 46 (12) :1154-1158