A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam

被引：39

作者：

Hajjaj, Amal Z. ^{[1
,2
]}

Jaber, Nizar ^{[1
,3
]}

Alcheikh, Nouha ^{[1
]}

Younis, Mohammad I. ^{[1
]}

机构：

[1] King Abdullah Univ Sci & Technol, Phys Sci & Engn Div, Thuwal 239556900, Saudi Arabia

[2] Loughborough Univ, Wolfson Sch Mech Elect & Mfg Engn, Loughborough LE11 3TU, Leics, England

[3] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47906 USA

来源：

IEEE SENSORS JOURNAL | 2020年 / 20卷 / 04期

关键词：

Resonant frequency; Gas detectors; Heating systems; Thermal conductivity; Gases; Conductivity; Gas sensor; multimode; buckling point; heated microbeam; MICROMACHINED THERMOELECTRIC SENSOR; FABRICATION; MICROSENSOR; INTEGRATION;

D O I：

10.1109/JSEN.2019.2950495

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to changes in gases concentrations. We demonstrate a 200& x0025; frequency shift in contrast to 0.5& x0025; resistance change using the conventional resistive technique. The method also demonstrates selective identification for some gases without the need for surface functionalization of the microstructure. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.

引用

页码：1778 / 1785

页数：8

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