Room temperature deposited oxide p-n junction using p-type zinc-cobalt-oxide

被引:40
作者
Kim, SeonHoo [1 ]
Cianfrone, J. A. [1 ]
Sadik, P. [1 ]
Kim, K.-W. [1 ]
Ivill, M. [1 ]
Norton, D. P. [1 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
关键词
THIN-FILM TRANSISTORS; DEVICE APPLICATION; ZNO; SEMICONDUCTORS; FABRICATION; DIODES;
D O I
10.1063/1.3415543
中图分类号
O59 [应用物理学];
学科分类号
摘要
Oxide semiconductors are attractive materials for thin-film electronics and optoelectronics due to compatibility with synthesis on large-area, inexpensive glass and flexible plastic substrate. However, development of thin-film electronics has been hampered by the limited number of semiconducting oxides that are p-type. Here, we report on the properties of zinc-cobalt-oxide (Zn-Co-O) films, deposited at room temperature using pulsed laser deposition, that exhibit p-type conduction. Films are deposited at room temperature in a background of oxygen using a polycrystalline ZnCo(2)O(4) ablation target. The p-type conduction is confirmed by positive Seebeck coefficient and positive Hall coefficient. Both electrical resistivity and carrier density are dependent on oxygen background pressure used during deposition. Zn-Co-O films deposited in 50 mTorr oxygen pressure appear to be amorphous based on x-ray diffraction, and show an electrical conductivity as high as 21 S cm(-1). Distinct rectifying current-voltage characteristics are observed for junctions between Zn-Co-O and n-type InGaZnO films, exhibiting a threshold voltage of similar to 2.5 V. P-type Zn-Co-O appears promising for thin-film electronic device technology. (C) 2010 American Institute of Physics. [doi:10.1063/1.3415543]
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页数:5
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