Optical beam steering using a 2D MEMS scanner

被引：2

作者：

Petremand, Yves ^{[1
]}

Clerc, Pierre-Andre ^{[1
]}

Epitaux, Marc ^{[2
]}

Hauffe, Ralf ^{[2
]}

Noell, Wilfried ^{[1
]}

de Rooij, N. F. ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, Rue Jaquet Droz 1, CH-2000 Neuchatel, Switzerland

[2] Intel Corp, Newark, CA 95054 USA

来源：

OPTOMECHATRONIC ACTUATORS AND MANIPULATION III | 2007年 / 6715卷

关键词：

2D scanner; DRIE; comb drives actuators; delay-mask process; fiber coupling;

D O I：

10.1117/12.754170

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light coming from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frequency measurements agree with the simulated ones.

引用

页数：9

共 10 条

[1]

EPITAUX M, 2005, OPT FIB COMM C 2005, V4

[2]

EPITAUX M, 2005, IEEE 2005 ELECT COMP, V2, P1339

[3]

Muller R., 1991, INTEGRIERTE OPTIK

[4] Low cost high volume laser modules using silicon optical bench technology [J].

Osenbach, JW ;

Dautartas, MF ;

Pitman, E ;

Nijander, C ;

Brady, M ;

Schlenker, RK ;

Butrie, T ;

Scrak, SP ;

Auker, BS ;

Kern, D ;

Salko, S ;

Rinaudo, D ;

Whitcraft, C ;

Dormer, JF .

48TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1998 PROCEEDINGS, 1998, :581-587

[5]

PETREMAND Y, 2005, 10 INT COMM MICR NAN, P477

[6]

PETREMAND Y, 2004, OPTICAL MEMS 2004 P, P58

[7] 20-mW widely tunable laser module using DFB array and MEMS selection [J].

Pezeshki, B ;

Vail, E ;

Kubicky, J ;

Yoffe, G ;

Heanue, J ;

Epp, P ;

Rishton, S ;

Ton, D ;

Faraji, B ;

Emanuel, M ;

Hong, X ;

Sherback, M ;

Agrawal, V ;

Chipman, C ;

Razazan, T .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (10) :1457-1459

[8]

SUNGHOON K, 2002, MICR EL MECCH SYST C, P483

[9]

Syms RRA, 2002, MAT TODAY JUL, P26

[10]

TOSHIYOSHI H, 2003, OPT MEMS C IEEE LEOS

← 1 →