The influence of micro/nano-structure on transmission ability of low-energy Electron Transmission Window

被引:1
作者
Tian, Zunyi [1 ,2 ]
Zhang, Mengmeng [1 ,2 ]
Zhang, Wei [1 ,2 ]
Hou, Zhongyu [1 ,2 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
SILICON; BEAM; EMISSION;
D O I
10.1063/5.0050778
中图分类号
O59 [应用物理学];
学科分类号
摘要
It is a extremely difficult to make the Electron Transmission Window (ETW) have the transmission ability for low-energy electrons, excellent mechanical strength, and thicker thickness at a large barometric pressure gradient, i.e., from vacuum to atmosphere. We present a new physical model of the ETW, which has a periodic array microstructure to restrain the temperature increase and nanostructures to provide transmission channels for electron sources. Two different periodic array micro-pattern ETWs with nanostructures have been prepared to testify the physical mechanisms, which are a thicker periodic array triangle micro-pattern unit with a nested triangle pillar type (NETW) and a thinner one without nested part type (OETW). A nanosecond-pulse power source and an array field emission electrode are adopted to focus the energy and reduce the energy dissipation of the electron source. The transmission efficiencies of the NETW and the OETW are 5.86% and 2.82% at -3.5kV, 8.90% and 5.77% at -5.5kV, and 12.69% and 11.97% at -8.5kV pulsed voltages, respectively. In addition, the transmission abilities of the two ETWs have been compared by visualization diagnoses in transient and steady states, which match well with the results of transmission efficiencies. It is found that the results are consistent with those of this novel model mechanism. Published under an exclusive license by AIP Publishing.
引用
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页数:15
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