Wavelength Trimming of Vertical-Cavity Surface-Emitting Lasers with High-Contrast Subwavelength Grating

被引：1
作者：
Gu, Xiaodong [1 ]
Imamura, Akihiro [1 ]
Koyama, Fumio [1 ]
机构：
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Photon Integrat Syst Res Ctr, Yokohama, Kanagawa 2268503, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 10期
关键词：
ARRAYS; MULTIWAVELENGTH; VCSEL;
D O I：
10.1143/JJAP.50.100207
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We proposed a trimming technology for the precise control of the lasing wavelength and lasing performance of high-contrast subwavelength grating (HCG) loaded vertical-cavity surface-emitting lasers (VCSELs). The trimming is based on the postprocess surface etching of HCG. Our result obtained using rigorous coupled wave analysis (RCWA) shows a possible precise wavelength tuning range of 3 nm for GaAs-based HCG-VCSELs. Our preliminary experiment reveals an expected smallest wavelength trimming of 0.07 nm. (C) 2011 The Japan Society of Applied Physics
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