Enhancement mode p-channel SnO thin-film transistors with dual-gate structures

被引:11
作者
Choi, Yong-Jin [1 ]
Han, Young-Joon [1 ]
Jeong, Chan-Yong [1 ]
Song, Sang-Hun [1 ]
Baek, Geun Woo [2 ]
Jin, Sung Hun [2 ]
Kwon, Hyuck-In [1 ]
机构
[1] Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea
[2] Incheon Natl Univ, Dept Elect Engn, Inchon 406772, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2015年 / 33卷 / 04期
基金
新加坡国家研究基金会;
关键词
BIAS STRESS STABILITY; DEPOSITION; TFT;
D O I
10.1116/1.4923236
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors demonstrate the enhancement mode p-type SnO thin-film transistors (TFTs) using dual gate (DG) structures. The cross-linked polyvinyl alcohol dielectric with a polymethylmethacrylate buffer layer is formed as a top gate (TG) insulator of the DG SnO TFT. The fabricated DG SnO TFT exhibits better electrical performances than the bottom gate (BG) and TG SnO TFTs including higher field-effect mobility and smaller subthreshold slope. In fabricated DG TFTs, the threshold voltage (V-th) of the BG TFT is linearly modulated by the voltage applied to the TG electrode. The BG transfer curve exhibits a depletion mode operation when measured while TG is grounded, but operates in the enhancement mode with a negative V-th (= -0.9 V) when a positive bias of 10 V is applied to the TG electrode. The enhancement mode operation of p-type SnO TFTs can increase the output voltage swing range and decreases the off-stage leakage currents of the complementary logic circuits. (C) 2015 American Vacuum Society.
引用
收藏
页数:5
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共 25 条
  • [1] The effect of deposition conditions and annealing on the performance of high-mobility GIZO TFTs
    Barquinha, P.
    Pereira, L.
    Goncalves, G.
    Martins, R.
    Fortunato, E.
    [J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 11 (09) : H248 - H251
  • [2] Complementary Oxide-Semiconductor-Based Circuits With n-Channel ZnO and p-Channel SnO Thin-Film Transistors
    Chiu, I-Chung
    Li, Yun-Shiuan
    Tu, Min-Sheng
    Cheng, I-Chun
    [J]. IEEE ELECTRON DEVICE LETTERS, 2014, 35 (12) : 1263 - 1265
  • [3] Gate-Bias Stress Stability of P-Type SnO Thin-Film Transistors Fabricated by RF-Sputtering
    Chiu, I-Chung
    Cheng, I-Chun
    [J]. IEEE ELECTRON DEVICE LETTERS, 2014, 35 (01) : 90 - 92
  • [4] Transparent p-type SnOx thin film transistors produced by reactive rf magnetron sputtering followed by low temperature annealing
    Fortunato, Elvira
    Barros, Raquel
    Barquinha, Pedro
    Figueiredo, Vitor
    Park, Sang-Hee Ko
    Hwang, Chi-Sun
    Martins, Rodrigo
    [J]. APPLIED PHYSICS LETTERS, 2010, 97 (05)
  • [5] Improvement of Long-Term Durability and Bias Stress Stability in p-Type SnO Thin-Film Transistors Using a SU-8 Passivation Layer
    Han, Young-Joon
    Choi, Yong-Jin
    Cho, In-Tak
    Jin, Sung Hun
    Lee, Jong-Ho
    Kwon, Hyuck-In
    [J]. IEEE ELECTRON DEVICE LETTERS, 2014, 35 (12) : 1260 - 1262
  • [6] DC-DC Converters Using Indium Gallium Zinc Oxide Thin Film Transistors for Mobile Display Applications
    Hong, Seok-Ha
    Yang, Ik-Seok
    Kang, Jin-Seong
    Hwang, Tong-Hun
    Kwon, Oh-Kyong
    Byun, Choon-Won
    Cheong, Woo-Seok
    Hwang, Chi-Sun
    Cho, Kyong-Ik
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (03)
  • [7] Fabrication of p-Type SnO Thin-Film Transistors by Sputtering with Practical Metal Electrodes
    Hsu, Po-Ching
    Chen, Wei-Chung
    Tsai, Yu-Tang
    Kung, Yen-Cheng
    Chang, Ching-Hsiang
    Hsu, Chao-Jui
    Wu, Chung-Chih
    Hsieh, Hsing-Hung
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (05)
  • [8] Nanometer-Scale Oxide Thin Film Transistor with Potential for High-Density Image Sensor Applications
    Jeon, Sanghun
    Park, Sungho
    Song, Ihun
    Hur, Ji-Hyun
    Park, Jaechul
    Kim, Hojung
    Kim, Sunil
    Kim, Sangwook
    Yin, Huaxiang
    Chung, U-In
    Lee, Eunha
    Kim, Changjung
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2011, 3 (01) : 1 - 6
  • [9] Jin S. H., 2003, SID INT S, V34, P1088
  • [10] Jin SH, 2004, J KOREAN PHYS SOC, V44, P181