Nitride-based photodetectors with unactivated Mg-doped GaN cap layer

被引:11
|
作者
Lam, K. T. [3 ]
Chang, P. C. [4 ]
Chang, S. J. [1 ,2 ]
Yu, C. L. [1 ,2 ]
Lin, Y. C. [1 ,2 ]
Sun, Y. X. [5 ]
Chen, C. H. [6 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[3] Leader Univ, Dept Informat Commun, Tainan 70970, Taiwan
[4] Nan Jeon Inst Technol, Dept Elect Engn, Yenshui 737, Tainan County, Taiwan
[5] China Univ Petr, Dept Mat Sci & Engn, Dongying 257061, Shandong, Peoples R China
[6] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 830, Taiwan
关键词
MOCVD; Mg-doped GaN; semi-insulating; cap layer;
D O I
10.1016/j.sna.2007.10.075
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nitride-based MIS-like photodetectors with in situ grown 30 nm thick unactivated semi-insulating Mg-doped GaN cap layers were fabricated. It was found that the reverse leakage current of aforementioned photodetector was comparably much smaller than that of conventional photodetector without the semi-insulating layer, due to the facts that inserting a semi-insulating layer would result in a thicker and higher potential barrier. We could also improve the ultraviolet to visible rejection ratio by inserting a semi-insulating Mg-doped GaN cap layer. To sum up, we have determined that the benefits of incorporating a semi-insulating Mg-doped GaN cap layer into the photodetector would encompass larger effective Schottky barrier height, and larger ultraviolet to visible rejection ratio. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:191 / 195
页数:5
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