Nitride-based photodetectors with unactivated Mg-doped GaN cap layer

被引:11
|
作者
Lam, K. T. [3 ]
Chang, P. C. [4 ]
Chang, S. J. [1 ,2 ]
Yu, C. L. [1 ,2 ]
Lin, Y. C. [1 ,2 ]
Sun, Y. X. [5 ]
Chen, C. H. [6 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[3] Leader Univ, Dept Informat Commun, Tainan 70970, Taiwan
[4] Nan Jeon Inst Technol, Dept Elect Engn, Yenshui 737, Tainan County, Taiwan
[5] China Univ Petr, Dept Mat Sci & Engn, Dongying 257061, Shandong, Peoples R China
[6] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 830, Taiwan
关键词
MOCVD; Mg-doped GaN; semi-insulating; cap layer;
D O I
10.1016/j.sna.2007.10.075
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nitride-based MIS-like photodetectors with in situ grown 30 nm thick unactivated semi-insulating Mg-doped GaN cap layers were fabricated. It was found that the reverse leakage current of aforementioned photodetector was comparably much smaller than that of conventional photodetector without the semi-insulating layer, due to the facts that inserting a semi-insulating layer would result in a thicker and higher potential barrier. We could also improve the ultraviolet to visible rejection ratio by inserting a semi-insulating Mg-doped GaN cap layer. To sum up, we have determined that the benefits of incorporating a semi-insulating Mg-doped GaN cap layer into the photodetector would encompass larger effective Schottky barrier height, and larger ultraviolet to visible rejection ratio. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:191 / 195
页数:5
相关论文
共 50 条
  • [1] Nitride-based MIS-like photodiodes with semiinsulating Mg-doped GaN cap layers
    Chang, S. J.
    Yu, C. L.
    Chuang, R. W.
    Chang, P. C.
    Lin, Y. C.
    Jhan, Y. W.
    Chen, C. H.
    IEEE SENSORS JOURNAL, 2006, 6 (05) : 1043 - 1044
  • [2] Low-noise and high-detectivity GaN-Based UV photodiode with a semi-insulating Mg-doped GaN cap layer
    Chang, P. C.
    Yu, C. L.
    Chang, S. J.
    Lin, Y. C.
    Liu, C. H.
    Wu, S. L.
    IEEE SENSORS JOURNAL, 2007, 7 (9-10) : 1270 - 1273
  • [3] Nitride-based ultraviolet Schottky barrier photodetectors with LT-AlN cap layers
    Yu, C. L.
    Chang, S. J.
    Chang, P. C.
    Lin, Y. C.
    Lee, C. T.
    SUPERLATTICES AND MICROSTRUCTURES, 2006, 40 (4-6) : 470 - 475
  • [4] Thermal annealing effect between Ni film and Mg-doped GaN layer
    Hsu, Chin-Yuan
    Lan, Wen-How
    Wu, YewChung Sermon
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (8A): : 6256 - 6258
  • [5] Mg-doped GaN activated with Ni catalysts
    Wang, SM
    Chen, CH
    Chang, SJ
    Su, YK
    Huang, BR
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 117 (02): : 107 - 111
  • [6] InGaN-GaN MQW metal-semiconductor-metal photodiodes with semi-insulating Mg-doped GaN cap layers
    Yu, C. L.
    Chuang, R. W.
    Chang, S. J.
    Chang, P. C.
    Lee, K. H.
    Lin, J. C.
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2007, 19 (9-12) : 846 - 848
  • [7] Hydrogen Can Passivate Carbon Impurities in Mg-Doped GaN
    Zhang, Yuheng
    Liang, Feng
    Zhao, Degang
    Jiang, Desheng
    Liu, Zongshun
    Zhu, Jianjun
    Yang, Jing
    Liu, Shuangtao
    NANOSCALE RESEARCH LETTERS, 2020, 15 (01):
  • [8] Mechanical Characteristics of Mg-Doped GaN Thin Films by Nanoindentation
    Jian, Sheng-Rui
    Ke, Wen-Cheng
    Juang, Jenh-Yih
    NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 2012, 4 (06) : 598 - 603
  • [9] Hydrogen Can Passivate Carbon Impurities in Mg-Doped GaN
    Yuheng Zhang
    Feng Liang
    Degang Zhao
    Desheng Jiang
    Zongshun Liu
    Jianjun Zhu
    Jing Yang
    Shuangtao Liu
    Nanoscale Research Letters, 2020, 15
  • [10] Performance Improvement of Nitride-Based Light-Emitting Diode With a Thin Mg-Delta-Doped Hole Injection Layer
    Xian, Yulun
    Huang, Shanjin
    Zheng, Zhiyuan
    Fan, Bingfeng
    Chen, Zimin
    Wu, Zhisheng
    Wang, Gang
    Zhang, Baijun
    Jiang, Hao
    JOURNAL OF DISPLAY TECHNOLOGY, 2013, 9 (04): : 255 - 259