Comparison of inductively coupled plasma-mass spectrometry, neutron activation analysis, and Hall effect techniques using antimony doped germanium

被引：2

作者：

Keefer, LA ^{[1
]}

Matthiesen, DH ^{[1
]}

机构：

[1] Case Western Reserve Univ, Dept Mat Sci & Engn, Cleveland, OH 44106 USA

来源：

JOURNAL OF CRYSTAL GROWTH | 2001年 / 225卷 / 2-4期

关键词：

characterization; inductively coupled plasma-mass spectrometry; liquid encapsulated Czochralski method; neutron activation analysis; Sb-doped Ge; semiconducting germanium;

D O I：

10.1016/S0022-0248(01)00840-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Three independent characterization techniques, Hall effect, neutron activation analysis (:NAA) and inductively coupled plasma-mass spectrometry (ICP-MS) were investigated to measure the antimony (Sb) concentration in Sb-doped germanium single crystals. The three LEC grown crystals had initial Sb concentrations ranging from 1 x 10(15) to 1 x 10(17)at/cm(3). The agreement between these three techniques was very good, averaging 15% below the Hall effect measurements for the ICP-MS measurements and averaging 2% below the Hall effect measurements for the NAA measurements. It was also found that the ICP-MS technique had the least variation among the three techniques. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：231 / 235

页数：5